Ti si target Ti Si alloy target vacuum sputtering ti si targ
时间:2020-04-13来源:未知 作者:admin 点击:
次
Titanium silicon target
product details
(1) Product features: the product has the characteristics of high purity.
(2) Product application: various targets
(3) Common specification granularity: as shown in the figure below or according to customer demand.
(4) Chemical composition and physical index (as shown below)
(5) Product executive standard:
|
name
|
Ingredients（at%)
|
Purity
|
Size
|
Density
|
制造方法
|
|
Planar target
|
TiSi
85/15 80/20 75/25
|
99.8%
|
<120µm
|
99.8%
|
HIp
|
|
Rotating target
|
TiSi
85/15 80/20 75/25
|
99.8%
|
<120µm
|
99.8%
|
HIP
|
|
Specification / size
|
Φ160*12 Φ128*15 Φ105*16 Φ100*32 Φ64*32 741*191*18 1040*191*18 1701*132*12 矩形靶材最长可达1800mm，圆形靶材直径可达350mm
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(责任编辑：xrypowder) |
